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Dependency Mass Flow Controller Product List

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Pressure-independent MFC "MARU7000s"

Achieves excellent corrosion resistance and leak characteristics through EP processing! A pressure-independent MFC that demonstrates outstanding flow stability.

The "MARU7000s" is a thermal + pressure sensor-based MFC that ensures excellent corrosion resistance and leak characteristics while demonstrating high flow stability. This product achieves high corrosion resistance and leak characteristics through EP treatment. Furthermore, it exhibits excellent flow stability due to its PI function, enabling superior crosstalk control. It features pressure insensitivity (pressure independence) and allows for the selection of valve types suitable for medium to large flow, such as Solenoid Valves, or for small to heavy flow, such as Piezo Valves. As a product portfolio built on domestic technology, it provides mass flow total solutions across various fields, including semiconductors, displays, and general industries. 【Features】 ■ Excellent corrosion resistance and leak performance with EP treatment ■ Superior flow stability with PI function ■ Excellent crosstalk control *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Dependency Mass Flow Controller

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